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Corresponding authors
a
Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, Center for Micro-Nanotechnology, School of Physics, Beijing Institute of Technology, Beijing 100081, P. R. China
E-mail:
[email protected]
b
Key Lab of Advanced Optoelectronic Quantum Design and Measurement, Ministry of Education, School of Physics, Beijing Institute of Technology, Beijing 100081, P. R. China
c
Optoelectronics Research Center, School of Science, Minzu University of China, Beijing, China
d
School of Micro-Nanoelectronics, ZJU-Hangzhou Global Scientific and Technological Innovation Center, State Key Labs of Silicon Materials and Modern Optical Instrumentation, Zhejiang University, Hangzhou 311200, China
e
MOE Key Lab of New Processing Technology for Nonferrous Metals and Materials and Guangxi Key Lab of Processing for Nonferrous Metals and Featured Materials, School of Resources, Environments and Materials, Guangxi University, Nanning 530004, P. R. China
f
Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, P. R. China